Instrumentation and measurement

Tunable Soft X-ray Light Source from McPherson

July 26, 2019

The new 642-1 Soft X-Ray (SXR) light source from McPherson features a six position anode carousel. Users can easily change anode target materials without breaking vacuum. Using different anode materials allows tuning the emitted eV energy. The vacuum housing of the source features standard NW40K vacuum flanges (optionally DN40CF). It also features two equivalent output beams. These provide ability for sample/reference comparison and device calibration. The new source is easy to set up and provides reliable emission-line source and means for at-wavelength calibration, or metrology of SXR lithography materials, multilayers or grazing incidence optical systems for astrophysics and other fundamental research.

This electron impact light source uses a hot filament to produce electrons subsequently accelerated towards a solid anode target by high voltage. The SXR and extreme UV output emission spectrum follows the target anode material valence band structure. Readily exchange anodes in the carousel in order to produce desired wavelengths, for example Si (0.71 nm), Mg (0.98 nm), C (4.4 nm) and many more. Many different anodes are available! This source is different from other sealed single wavelength x-ray tubes, because a selection of materials are installed in the evacuated housing at one time.

The controller for the new SXR source has also been improved. It provides emission loop regulation for control of the filament and high voltage. One easily operated controller drives source parameters and allows adjusting high-voltage to 10,000 volts and current up to 10 milliamps. The new source is compact and controllable, output is debris free. Stable operation is attained with vacuum of 5 x 10E-5 Torr or lower. The source is available on special order with powers high as 300 Watts. Filter wheels, gate valves, pinhole collimators, and energy- or other standard detectors are also available.