Angstrom Sciences, Inc. manufacturer’s high efficiency Magnetron Sputtering Cathodes for the plasma vapor deposition of thin films. Superior performance and reliability of these technically advanced magnetrons have led to worldwide market acceptance.
Angstrom Sciences’ magnetrons are used in a wide variety of applications because the patented profiled magnet technology and turbulent water flow design combine to provide:
Another outstanding advantage of our technology lies in its scalability. We supply state-of-the-art circular, rectangular, and cylindrical magnetrons in a wide range of sizes with magnetic variations, design options, and accessories available to optimize your application.
Our magnetrons are designed, engineered, and manufactured within our 18,000 square-foot facility by a qualified group of highly skilled specialists. From FEA magnet mapping, 2D and 3D engineering, to state-of-the-art CNC machining, our in-house capabilities provide you with the highest quality and control possible.
We complement our design flexibility with an expert, customer-oriented technical support staff, that can provide the best product advice and application assistance when you need it. Our entire business has been designed to serve your most demanding thin film needs, and our objective is complete and unqualified customer satisfaction.
Magnetron Sputtering Design
There is much more to designing a world-class magnetron than simply strapping some magnets into a water-cooled cavity and hoping for the best.
At Angstrom Sciences we are able to combine:
The first step of the “process” relies on a thorough understanding of the application and the overall project requirements. These discussions, carried out by our team of trained sales engineers and process engineers identifies the critical performance criteria of the device as well as any unique process requirements and/or system constraints (clearance, size, shape, interference issues, etc.) that must be accommodated.
In many cases we are tasked to retrofit non-Angstrom Science magnetrons with our magnetic technology and this path adds a step where we examine the existing design for space, cooling water, and general geometrical considerations.
Once the application is completely understood, a detailed proposal is generated for customer consideration. The proposal includes all relevant commercial and technical details; in essence a complete statement of work that explicitly details the depth and breadth of supply along with the required product metrics.
Immediately upon order placement, detailed mechanical and magnetic design activities commence. A detailed final design is developed that accommodates the “magnetics” required to meet and in most cases exceed, the customer’s requirements. At this point extensive use of finite element analysis is used to optimize the magnetic field distribution and intensity. Simulation and modeling allows Angstrom Sciences to take full advantage of the spectrum of tools and techniques (magnetic geometry, placement, field strength, etc.) necessary to fully optimize a design before any metal is “cut”!
When the final design is completed, it is presented to the customer for review and approval. This is the stage that any final design considerations and/or customer requirements can be accommodated; an important consideration to ensure that what is built precisely and accurately addresses the intention of the device in the first step. In almost all cases, this is the stage where the final “fit” in the deposition chamber that it will reside in is checked and verified. With modern deposition systems costing in excess of $ 1,000,000 this is a step whose importance cannot be underestimated and or minimized.
Immediately after the approval drawing milestone is completed, the cathode is released to Angstrom Science’s manufacturing group. All incoming raw materials undergo a rigorous inspection and Angstrom’s computer aided manufacturing (CAM) capabilities ensure that the finished components match the CAD design; exacting performance requires exacting components! The components are then assembled in a pristine, clean environment where they are subjected to a comprehensive battery of functional and performance tests before they are shipped to their final destination.
Angstrom Sciences designs, engineers, and manufactures a complete line of magnetron sputtering cathodes for a variety of R&D and production applications. The solid construction, patented magnetron technology and turbulent water flow designed into every one of our magnetrons provides our customers the superior performance their processes demand – no matter what the application.
Aerospace & Defense
Electronics / Microelectronics
Tool and drill bit hardening
Thanks to the superior performance and robust construction of the ONYX® -series of circular deposition sources, Angstrom Sciences’ magnetron sputtering cathodes gained worldwide acceptance and the company has consistently grown its product line to include linear magnetrons, planar rotary magnetrons, and, most recently, rotating cylindrical magnetrons for high production applications.
A network of qualified vacuum deposition representatives and distributors are available throughout Asia, Australia, Europe and North America to assist you with your specific application needs.